JOURNAL ARTICLE
Highly conductive and transparent ZnO:Al thin films prepared on high-temperature substrates by d.c. magnetron sputtering
Hirotaka SatoTadatsugu MinamiS. TakataT. MouriN. Ogawa
Year: 1992 Journal: Thin Solid Films Vol: 220 (1-2)Pages: 327-332 Publisher: Elsevier BV
Keywords:
Materials science Sputtering Sputter deposition Substrate (aquarium) Thin film Electrical resistivity and conductivity Transmittance Transparent conducting film Sheet resistance Aluminium Analytical Chemistry (journal) Electrical conductor Optoelectronics Composite material Nanotechnology Chemistry Layer (electronics)
Metrics
79
Cited By
2.63
FWCI (Field Weighted Citation Impact)
11
Refs
0.90
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
ZnO doping and properties
Physical Sciences → Materials Science → Materials Chemistry
Gas Sensing Nanomaterials and Sensors
Physical Sciences → Engineering → Electrical and Electronic Engineering
Copper-based nanomaterials and applications
Physical Sciences → Materials Science → Materials Chemistry
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