Synthesis of buried metal oxide films by high fluence oxygen ion implantation into metals

C. Hammerl; B. Rauschenbach

doi:10.1016/s0168-583x(00)00464-x

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Synthesis of buried metal oxide films by high fluence oxygen ion implantation into metals

C. Hammerl B. Rauschenbach

Year: 2001 Journal: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Vol: 178 (1-4)Pages: 220-223 Publisher: Elsevier BV

DOI: 10.1016/s0168-583x(00)00464-x

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Keywords:

Fluence Materials science Metal Oxide Ion implantation Oxygen Metallurgy Ion Chemistry

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Chemical and Physical Properties of Materials

Physical Sciences → Materials Science → Materials Chemistry

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Synthesis of buried metal oxide films by high fluence oxygen ion implantation into metals

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