JOURNAL ARTICLE

Synthesis of buried metal oxide films by high fluence oxygen ion implantation into metals

C. HammerlB. Rauschenbach

Year: 2001 Journal:   Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Vol: 178 (1-4)Pages: 220-223   Publisher: Elsevier BV
Keywords:
Fluence Materials science Metal Oxide Ion implantation Oxygen Metallurgy Ion Chemistry

Metrics

4
Cited By
0.75
FWCI (Field Weighted Citation Impact)
5
Refs
0.68
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Chemical and Physical Properties of Materials
Physical Sciences →  Materials Science →  Materials Chemistry
Ion-surface interactions and analysis
Physical Sciences →  Engineering →  Computational Mechanics
Transition Metal Oxide Nanomaterials
Physical Sciences →  Materials Science →  Polymers and Plastics

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