JOURNAL ARTICLE

Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers

Kurt MatoyHelmut SchönherrThomas DetzelGerhard Dehm

Year: 2010 Journal:   Thin Solid Films Vol: 518 (20)Pages: 5796-5801   Publisher: Elsevier BV
Keywords:
Materials science Fracture toughness Composite material Silicon nitride Cantilever Layer (electronics) Bending Brittleness Focused ion beam Stress (linguistics) Ultimate tensile strength Silicon oxide Fracture (geology) Silicon Amorphous solid Optoelectronics Ion Chemistry Crystallography

Metrics

23
Cited By
1.50
FWCI (Field Weighted Citation Impact)
14
Refs
0.81
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials

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