JOURNAL ARTICLE
Characterization of amorphous SiOx layers with ESCA
Year: 1985 Journal: Surface Science Letters Vol: 162 (1-3)Pages: A611-A611 Publisher: Elsevier BV
Keywords:
Characterization (materials science) Amorphous solid Materials science Nanotechnology Chemistry Crystallography
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Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon and Solar Cell Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Surface Roughness and Optical Measurements
Physical Sciences → Engineering → Computational Mechanics
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