JOURNAL ARTICLE
Silicon–glass-based single piezoresistive pressure sensors for harsh environment applications
Haisheng SanHong ZhangQiang ZhangYuxi YuXuyuan Chen
Year: 2013 Journal: Journal of Micromechanics and Microengineering Vol: 23 (7)Pages: 075020-075020 Publisher: IOP Publishing
Abstract
National Natural Science Foundation of China [51075344, 61274120, 51175444]; Fujian Province Major Projects on University-Industry Cooperation in Science and Technology [2013H6023]; Science and Technology Program of Xiamen [3502Z20123008, 3502Z20126006]
Keywords:
Piezoresistive effect Silicon Materials science Pressure sensor Optoelectronics Electronic engineering Nanotechnology Engineering physics Electrical engineering Composite material Engineering Mechanical engineering
Metrics
33
Cited By
1.45
FWCI (Field Weighted Citation Impact)
26
Refs
0.85
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Electrical and Thermal Properties of Materials
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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