Piezoresistive Pressure Sensors for Applications in Harsh Environments—A Roadmap

Ha-Duong Ngo; O. Ehrmann; Martin Schneider‐Ramelow; Klaus‐Dieter Lang

doi:10.1007/978-3-319-99540-3_12

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Piezoresistive Pressure Sensors for Applications in Harsh Environments—A Roadmap

Ha-Duong Ngo O. Ehrmann Martin Schneider‐Ramelow Klaus‐Dieter Lang

Year: 2018 Smart sensors, measurement and instrumentation Pages: 231-251 Publisher: Springer Nature

DOI: 10.1007/978-3-319-99540-3_12

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Keywords:

Piezoresistive effect Electronics Automotive industry Microelectromechanical systems Materials science Silicon carbide Aerospace Silicon Engineering physics Silicon on insulator Semiconductor Mechanical engineering Electrical engineering Nanotechnology Engineering Optoelectronics Aerospace engineering Composite material

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Piezoresistive Pressure Sensors for Applications in Harsh Environments—A Roadmap

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