Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering

Mohammad Yeakub Ali; Andrew Ong

doi:10.1007/s00170-005-0220-9

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Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering

Mohammad Yeakub Ali Andrew Ong

Year: 2006 Journal: The International Journal of Advanced Manufacturing Technology Vol: 31 (5-6)Pages: 501-508 Publisher: Springer Science+Business Media

DOI: 10.1007/s00170-005-0220-9

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Keywords:

Materials science Sputtering Focused ion beam Tungsten carbide Scanning electron microscope Surface roughness Grinding Microfabrication Surface micromachining Optoelectronics Composite material Nanotechnology Ion Thin film Fabrication

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Topics

Advanced Machining and Optimization Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering

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Citation History

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