Development of flat, smooth (100) faceted diamond thin films using microwave plasma chemical vapor deposition

Andrew L. Yee; H. C. Ong; L. M. Stewart; R. P. H. Chang

doi:10.1557/jmr.1997.0248

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Development of flat, smooth (100) faceted diamond thin films using microwave plasma chemical vapor deposition

Andrew L. Yee H. C. Ong L. M. Stewart R. P. H. Chang

Year: 1997 Journal: Journal of materials research/Pratt's guide to venture capital sources Vol: 12 (7)Pages: 1796-1805 Publisher: Springer Nature

DOI: 10.1557/jmr.1997.0248

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Keywords:

Materials science Diamond Chemical vapor deposition Scanning electron microscope Raman spectroscopy Carbon film Silicon Composite material Thin film Nanotechnology Chemical engineering Optics Optoelectronics

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Topics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Development of flat, smooth (100) faceted diamond thin films using microwave plasma chemical vapor deposition

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