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JOURNAL ARTICLE

Intrinsic stress of magnetron-sputtered niobium films

Year: 1979 Journal: Thin Solid Films Vol: 64 (1)Pages: 103-110 Publisher: Elsevier BV

DOI: 10.1016/0040-6090(79)90549-2

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Keywords:

Argon Materials science Sputtering Niobium Microstructure Composite material Stress (linguistics) Sputter deposition Ultimate tensile strength Biasing Peening Metallurgy Thin film Analytical Chemistry (journal) Voltage Residual stress Chemistry Nanotechnology Electrical engineering

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119

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2.09

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12

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0.84

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Topics

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

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