Preparation of PbTiO₃ Thin Films Using a Coating Photolysis Process with ArF Excimer Laser

Abstract

TiO 2 , PbO and PbTiO 3 thin films were prepared using the Titanium-2-ethylhexanolate and lead-2-ethylhexanoate coating photolysis process with ArF excimer laser irradiation. The photolysis of Ti-2-ethylhexanolate, Pb-2-ethylhexanoate and mixed Ti-2-ethylhexanolate and Pb-2-ethylhexanoate was investigated by Fourier transform infrared (FT-IR) absorption spectroscopy and X-ray diffraction (XRD). In the case of the one-step ArF irradiation method at 50 mJ/cm 2 with a repetition rate of 10 Hz for 5 min, rutile TiO 2 and PbTiO 3 perovskite phase along with a pyrochlore phase were obtained, while PbO was not obtained. On the other hand, in the case of the two-step ArF irradiation method consisting of preliminary weak irradiation at 10 mJ/cm 2 with a repetition rate of 50 Hz for 0.5 min and a stronger irradiation at 50 mJ/cm 2 with a repetition rate of 10 Hz for 5 min, anatase TiO 2 , β-PbO and a single phase of perovskite PbTiO 3 were successfully obtained. The crystallization mechanism of PbTiO 3 films from the metallorganic precursor is also discussed.