Preparation of PbTiO₃ Thin Films by an Excimer Laser Ablation Technique with Second Laser Irradiation

Abstract

Ferroelectric PbTiO 3 thin films have been formed on based electrodes of Pt or oxide superconductor ((La, Sr) 2 CuO 4 ) by an ArF excimer laser ablation technique. A second laser irradiation at the substrate surface is quite effective in the crystallization of the films at low substrate temperature below 400°C. The suitable energy density of the irradiation laser is in the range of 30-100 mJ/cm 2 . X-ray diffraction patterns of PbTiO 3 thin films show c -axis orientation, with FWHM (full width at half maximum) of rocking curve of 0.5°-1.0°. These films exhibit a ferroelectric hysteresis loop. The dielectric constant and remanent polarization of the PbTiO 3 films are in the range of 120-150 and 20-25 µC/cm 2 , respectively.