JOURNAL ARTICLE

Highly piezoresistive hybrid MEMS sensors

Damien ThuauCédric AyelaPhilippe PoulinIsabelle Dufour

Year: 2014 Journal:   Sensors and Actuators A Physical Vol: 209 Pages: 161-168   Publisher: Elsevier BV
Keywords:
Piezoresistive effect Gauge factor Microelectromechanical systems Materials science Strain gauge Sensitivity (control systems) Strain (injury) Work (physics) Transducer Electrical resistance and conductance Optoelectronics Electronic engineering Composite material Acoustics Mechanical engineering Engineering Physics Fabrication

Metrics

37
Cited By
2.49
FWCI (Field Weighted Citation Impact)
27
Refs
0.91
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
© 2026 ScienceGate Book Chapters — All rights reserved.