JOURNAL ARTICLE
Highly piezoresistive hybrid MEMS sensors
Damien ThuauCédric AyelaPhilippe PoulinIsabelle Dufour
Year: 2014 Journal: Sensors and Actuators A Physical Vol: 209 Pages: 161-168 Publisher: Elsevier BV
Keywords:
Piezoresistive effect Gauge factor Microelectromechanical systems Materials science Strain gauge Sensitivity (control systems) Strain (injury) Work (physics) Transducer Electrical resistance and conductance Optoelectronics Electronic engineering Composite material Acoustics Mechanical engineering Engineering Physics Fabrication
Metrics
37
Cited By
2.49
FWCI (Field Weighted Citation Impact)
27
Refs
0.91
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Advanced Sensor and Energy Harvesting Materials
Physical Sciences → Engineering → Biomedical Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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