JOURNAL ARTICLE
MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors
Lei WeiZhiwei YouXuebao KuaiMingliang ZhangFuhua YangXiaodong Wang
Year: 2022 Journal: Microsystem Technologies Vol: 29 (1)Pages: 1-17 Publisher: Springer Science+Business Media
Keywords:
Piezoresistive effect Resonator Microelectromechanical systems Feedthrough Materials science Optoelectronics Thermal Oscillation (cell signaling) Electronic engineering Electrical engineering Acoustics Engineering Physics
Metrics
13
Cited By
7.63
FWCI (Field Weighted Citation Impact)
101
Refs
0.87
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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