JOURNAL ARTICLE
Platinum silicide formation on Si1−yCy epitaxial layers
Sheng-Wei LeeI.-Ping LinHung-Tai ChangSheng‐Wei Lee
Year: 2013 Journal: Journal of Alloys and Compounds Vol: 574 Pages: 415-420 Publisher: Elsevier BV
Keywords:
Silicide Materials science Epitaxy Thermal stability Microstructure Oxide Electrical resistivity and conductivity Platinum Layer (electronics) Optoelectronics Nanotechnology Chemical engineering Metallurgy Catalysis Electrical engineering Chemistry
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5
Cited By
0.54
FWCI (Field Weighted Citation Impact)
31
Refs
0.70
Citation Normalized Percentile
Is in top 1%
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Citation History
Topics
Semiconductor materials and interfaces
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon and Solar Cell Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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