JOURNAL ARTICLE

Platinum silicide formation on Si1−yCy epitaxial layers

Sheng-Wei LeeI.-Ping LinHung-Tai ChangSheng‐Wei Lee

Year: 2013 Journal:   Journal of Alloys and Compounds Vol: 574 Pages: 415-420   Publisher: Elsevier BV
Keywords:
Silicide Materials science Epitaxy Thermal stability Microstructure Oxide Electrical resistivity and conductivity Platinum Layer (electronics) Optoelectronics Nanotechnology Chemical engineering Metallurgy Catalysis Electrical engineering Chemistry

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5
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0.54
FWCI (Field Weighted Citation Impact)
31
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0.70
Citation Normalized Percentile
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Citation History

Topics

Semiconductor materials and interfaces
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon and Solar Cell Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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