High-resolution direct-write patterning using focused ion beams

Leonidas E. Ocola; Chad Rue; Diederik Maas

doi:10.1557/mrs.2014.56

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High-resolution direct-write patterning using focused ion beams

Leonidas E. Ocola Chad Rue Diederik Maas

Year: 2014 Journal: MRS Bulletin Vol: 39 (4)Pages: 336-341 Publisher: Springer Nature

DOI: 10.1557/mrs.2014.56

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Keywords:

Materials science High resolution Nanotechnology Resolution (logic) Focused ion beam Ion Engineering physics Computer science Physics Geology Remote sensing Artificial intelligence

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Advanced Electron Microscopy Techniques and Applications

Life Sciences → Biochemistry, Genetics and Molecular Biology → Structural Biology

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Integrated Circuits and Semiconductor Failure Analysis

Physical Sciences → Engineering → Electrical and Electronic Engineering

High-resolution direct-write patterning using focused ion beams

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