JOURNAL ARTICLE

High-resolution direct-write patterning using focused ion beams

Leonidas E. OcolaChad RueDiederik Maas

Year: 2014 Journal:   MRS Bulletin Vol: 39 (4)Pages: 336-341   Publisher: Springer Nature
Keywords:
Materials science High resolution Nanotechnology Resolution (logic) Focused ion beam Ion Engineering physics Computer science Physics Geology Remote sensing Artificial intelligence

Metrics

35
Cited By
2.72
FWCI (Field Weighted Citation Impact)
42
Refs
0.95
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced Electron Microscopy Techniques and Applications
Life Sciences →  Biochemistry, Genetics and Molecular Biology →  Structural Biology
Ion-surface interactions and analysis
Physical Sciences →  Engineering →  Computational Mechanics
Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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