JOURNAL ARTICLE
High Resolution 3-D Laser Direct-Write Patterning
Linjie LiRafael R. GattassMichael P. StockerErez GershgorenHana HwangJohn T. Fourkas
Year: 2010 Vol: 46 Pages: JTuA1-JTuA1
Abstract
Resolution Augmentation through Photo-Induced Deactivation (RAPID) lithography makes possible the creation of features that far smaller than the wavelength of light employed. We will present some of the latest advances in RAPID lithography.
Keywords:
Lithography Extreme ultraviolet lithography Next-generation lithography Resolution (logic) Laser Computational lithography Multiple patterning Maskless lithography Photolithography Materials science Optoelectronics Wavelength Optics Immersion lithography Nanotechnology Computer science Resist Electron-beam lithography Physics Artificial intelligence
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Topics
Nonlinear Optical Materials Studies
Physical Sciences → Engineering → Biomedical Engineering
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
Advanced Fluorescence Microscopy Techniques
Life Sciences → Biochemistry, Genetics and Molecular Biology → Biophysics
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