JOURNAL ARTICLE
Core/Shell Structured Solid-Silica/Mesoporous-Silica Microspheres as Novel Abrasives for Chemical Mechanical Polishing
Yang ChenYayun WangJiawei QinAilian Chen
Year: 2015 Journal: Tribology Letters Vol: 58 (3) Publisher: Springer Science+Business Media
Keywords:
Materials science Abrasive Chemical-mechanical planarization Polishing Mesoporous silica Scanning electron microscope Abrasion (mechanical) Porosity Composite material Mesoporous material Chemical engineering
Metrics
16
Cited By
0.52
FWCI (Field Weighted Citation Impact)
27
Refs
0.67
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
Advanced ceramic materials synthesis
Physical Sciences → Materials Science → Ceramics and Composites
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