JOURNAL ARTICLE
Solid-silica core/mesoporous-silica shell composite abrasives: synthesis, characterization, and the effect of mesoporous shell structures on CMP
Yang ChenChangzhi ZuoXiangyu MaAilian Chen
Year: 2017 Journal: Journal of Materials Science Materials in Electronics Vol: 29 (5)Pages: 3817-3828 Publisher: Springer Science+Business Media
Keywords:
Materials science Composite number Mesoporous silica Chemical-mechanical planarization Abrasive Composite material Mesoporous material Polishing Mesoporous organosilica Chemical engineering Chemistry Catalysis Organic chemistry
Metrics
10
Cited By
0.69
FWCI (Field Weighted Citation Impact)
38
Refs
0.68
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
Force Microscopy Techniques and Applications
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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