JOURNAL ARTICLE

Solid-silica core/mesoporous-silica shell composite abrasives: synthesis, characterization, and the effect of mesoporous shell structures on CMP

Yang ChenChangzhi ZuoXiangyu MaAilian Chen

Year: 2017 Journal:   Journal of Materials Science Materials in Electronics Vol: 29 (5)Pages: 3817-3828   Publisher: Springer Science+Business Media
Keywords:
Materials science Composite number Mesoporous silica Chemical-mechanical planarization Abrasive Composite material Mesoporous material Polishing Mesoporous organosilica Chemical engineering Chemistry Catalysis Organic chemistry

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10
Cited By
0.69
FWCI (Field Weighted Citation Impact)
38
Refs
0.68
Citation Normalized Percentile
Is in top 1%
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Citation History

Topics

Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics

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