JOURNAL ARTICLE
Direct writing laser lithography for production of microstructures
H. UlrichRoelof W. Wijnaendts-Van-ResandtC. RenschW. Ehrensperger
Year: 1987 Journal: Microelectronic Engineering Vol: 6 (1-4)Pages: 77-84 Publisher: Elsevier BV
Keywords:
Lithography Wafer Resist Laser Materials science Maskless lithography Focus (optics) Optics Optoelectronics Nanotechnology Computer science Electron-beam lithography Physics
Metrics
22
Cited By
2.51
FWCI (Field Weighted Citation Impact)
2
Refs
0.88
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Laser Material Processing Techniques
Physical Sciences → Engineering → Computational Mechanics
Laser Design and Applications
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced optical system design
Physical Sciences → Engineering → Biomedical Engineering
Related Documents
JOURNAL ARTICLE
Cost effective maskless lithography: Direct UV laser writing of microstructures for microfluidics applications
Mohammed ZiauddinAbdel‐Hamid I. MouradSaud Khashan
Journal: 2018 Advances in Science and Engineering Technology International Conferences (ASET) Year: 2018 Vol: 2 Pages: 1-3
JOURNAL ARTICLE
Lithography by maskless laser direct writing
Andreas OstendorfJ. KochF. MeyerBoris N. Chichkov
Year: 2006 Pages: 1-6
JOURNAL ARTICLE
Laser scanner for direct writing lithography
C. RenschStefan W. HellM. von SchickfusSiegfried Hunklinger
Journal: Applied Optics Year: 1989 Vol: 28 (17)Pages: 3754-3754
JOURNAL ARTICLE
Functional Microstructures via Direct Laser Writing
Journal: Repository KITopen (Karlsruhe Institute of Technology) Year: 2015
JOURNAL ARTICLE
Laser direct writing system and its lithography properties
Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Year: 1998 Vol: 3550 Pages: 409-409