JOURNAL ARTICLE

Functional Microstructures via Direct Laser Writing

Alexander S. Quick

Year: 2015 Journal:   Repository KITopen (Karlsruhe Institute of Technology)   Publisher: Karlsruhe Institute of Technology

Abstract

In the current thesis novel chemical photoresist systems for the fabrication of functional microstructures via three dimensional lithography are described. Next to in-depth characterization of the produced structures, the selected polymerization procedures during curing allowed for covalent postmodification. For the different curing systems, namely for thiol-ene, thiol-yne, and photoenol chemistry, structures were modified in a single, dual, and spatially resolved manner by click chemistry.

Keywords:
Photoresist Microstructure Curing (chemistry) Lithography Fabrication Polymerization Nanotechnology Materials science Click chemistry Characterization (materials science) Covalent bond Chemistry Polymer chemistry Polymer Organic chemistry Composite material Optoelectronics

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Topics

Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Photopolymerization techniques and applications
Physical Sciences →  Chemistry →  Organic Chemistry
Various Chemistry Research Topics
Physical Sciences →  Chemistry →  Physical and Theoretical Chemistry
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