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JOURNAL ARTICLE
Passivation of gallium arsenide by reactively sputtered gallium nitride thin films
A.B. Bhattacharyya
E. Lakshmi
Year:
1983
Journal:
Microelectronics Journal
Vol:
14 (1)
Pages:
43-48
Publisher:
Elsevier BV
DOI:
10.1016/s0026-2692(83)80168-2
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Keywords:
Materials science
Gallium arsenide
Passivation
Gallium
Gallium nitride
Nitride
Auger electron spectroscopy
Nitrogen
Interface (matter)
Thin film
Optoelectronics
Analytical Chemistry (journal)
Composite material
Metallurgy
Nanotechnology
Chemistry
Layer (electronics)
Metrics
1
Cited By
0.00
FWCI (Field Weighted Citation Impact)
15
Refs
0.08
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Semiconductor materials and interfaces
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
GaN-based semiconductor devices and materials
Physical Sciences → Physics and Astronomy → Condensed Matter Physics
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