Photodecomposition of precursors for metal organic vapour phase epitaxy

W. Richter; P. Kurpas; M. Waschbüsch

doi:10.1016/0169-4332(92)90008-l

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Photodecomposition of precursors for metal organic vapour phase epitaxy

W. Richter P. Kurpas M. Waschbüsch

Year: 1992 Journal: Applied Surface Science Vol: 54 Pages: 1-7 Publisher: Elsevier BV

DOI: 10.1016/0169-4332(92)90008-l

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Keywords:

Epitaxy Metal Phase (matter) Materials science Metalorganic vapour phase epitaxy Chemistry Inorganic chemistry Chemical engineering Nanotechnology Organic chemistry Metallurgy

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Spectroscopy and Laser Applications

Physical Sciences → Chemistry → Spectroscopy

Catalysis and Oxidation Reactions

Physical Sciences → Chemical Engineering → Catalysis

Catalytic Processes in Materials Science

Physical Sciences → Materials Science → Materials Chemistry

Photodecomposition of precursors for metal organic vapour phase epitaxy

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