Micro/nanofabrication of two and three dimensional structures by two-photon polymerization

Abstract

Femtosecond infrared laser pulses are useful for laser micro/nanofabrication of two and three dimensional (2D & 3D) structures through multiphoton process. 2D & 3D polymeric structures were fabricated by two-photon polymerization. These features were produced by designing multibeam interference and writing patterns. The influence of post-developing process, which leads to a dramatic change in 2D rod array, also be discussed. These methods provide simple and rapid approaches for creating templates with designed 2D & 3D structure in micro/nanometer scales.