The theory, instrumentation and applications of three-dimensional microfabrication are given with a variety of examples. Structures shown include: SEM images of a 10 /spl mu/m bull and a micro-spring; a self-grown filament by the single photon process; self-merging of two fibers, and splitting into many fibers; and a photopolymer photonic crystal from the top and side views.
Sang‐Hu ParkTae Woo LimDong‐Yol Yang
Maria Guadalupe del Rocio Herrera SalazarHiroyuki AkiyamaTadachika NakayamaHisayuki SuematsuKoichi Niihara
F. FormanekNobuyuki TakeyasuTakuo TanakaKenta ChiyodaAtsushi IshikawaSatoshi Kawata
Maria FarsariGeorge FilippidisC. Fotakis