BOOK-CHAPTER
Silicon–germanium (SiGe) crystal growth using chemical vapor deposition
Year: 2011 Elsevier eBooks Pages: 117-146 Publisher: Elsevier BV
Keywords:
Chemical vapor deposition Materials science Germanium Doping Silicon Epitaxy Silicon-germanium Layer (electronics) Optoelectronics Engineering physics Nanotechnology Engineering
Metrics
2
Cited By
0.00
FWCI (Field Weighted Citation Impact)
93
Refs
0.06
Citation Normalized Percentile
Is in top 1%
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Citation History
Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon and Solar Cell Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences → Engineering → Electrical and Electronic Engineering
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