JOURNAL ARTICLE

Effects of oxygen partial pressure on the characteristics of magnetron-sputtered ZnMgBeO thin films

Hoang Ba CuongByung‐Teak Lee

Year: 2015 Journal:   Applied Surface Science Vol: 355 Pages: 582-586   Publisher: Elsevier BV
Keywords:
Oxygen Full width at half maximum Partial pressure X-ray photoelectron spectroscopy Analytical Chemistry (journal) Materials science Thin film Grain size Sputter deposition Band gap Cavity magnetron Chemistry Sputtering Metallurgy Nanotechnology Optoelectronics Nuclear magnetic resonance

Metrics

7
Cited By
0.26
FWCI (Field Weighted Citation Impact)
25
Refs
0.53
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

ZnO doping and properties
Physical Sciences →  Materials Science →  Materials Chemistry
Gas Sensing Nanomaterials and Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Ga2O3 and related materials
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials

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