JOURNAL ARTICLE

Influence of oxygen partial pressure on magnetron sputtered Sr0.8Nd0.3Bi2.5Ta2O9+x ferroelectric thin films

Yibin LiSam ZhangThirumany SritharanYang LiuT. P. Chen

Year: 2007 Journal:   Journal of Alloys and Compounds Vol: 457 (1-2)Pages: 549-554   Publisher: Elsevier BV
Keywords:
Partial pressure Thin film Sputter deposition X-ray photoelectron spectroscopy Materials science Sputtering Microstructure Oxygen Analytical Chemistry (journal) Scanning electron microscope Perovskite (structure) Bismuth Ferroelectricity Chemistry Chemical engineering Crystallography Dielectric Metallurgy Nanotechnology Composite material Optoelectronics

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31
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0.77
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Citation History

Topics

Ferroelectric and Piezoelectric Materials
Physical Sciences →  Materials Science →  Materials Chemistry
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
Microwave Dielectric Ceramics Synthesis
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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