JOURNAL ARTICLE

Calibration of z-axis linearity for arbitrary optical topography measuring instruments

Matthias EiflerJörg SeewigJulian HeringGeorg von Freymann

Year: 2015 Journal:   Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 9525 Pages: 952510-952510   Publisher: SPIE

Abstract

Paper 952510, 10 S.

Keywords:
Linearity Calibration Computer science Optics Measurement uncertainty Optical axis Coordinate-measuring machine Range (aeronautics) System of measurement Point (geometry) Observational error Computer vision Physics Geometry Mathematics Materials science

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11
Cited By
2.37
FWCI (Field Weighted Citation Impact)
7
Refs
0.88
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Citation History

Topics

Advanced Measurement and Metrology Techniques
Physical Sciences →  Engineering →  Mechanical Engineering
Optical measurement and interference techniques
Physical Sciences →  Computer Science →  Computer Vision and Pattern Recognition
Surface Roughness and Optical Measurements
Physical Sciences →  Engineering →  Computational Mechanics
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