Calibration of z-axis linearity for arbitrary optical topography measuring instruments

Matthias Eifler; Jörg Seewig; Julian Hering; Georg von Freymann

doi:10.1117/12.2190737

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Calibration of z-axis linearity for arbitrary optical topography measuring instruments

Matthias Eifler Jörg Seewig Julian Hering Georg von Freymann

Year: 2015 Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 9525 Pages: 952510-952510 Publisher: SPIE

DOI: 10.1117/12.2190737

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Abstract

Paper 952510, 10 S.

Keywords:

Linearity Calibration Computer science Optics Measurement uncertainty Optical axis Coordinate-measuring machine Range (aeronautics) System of measurement Point (geometry) Observational error Computer vision Physics Geometry Mathematics Materials science

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Topics

Advanced Measurement and Metrology Techniques

Physical Sciences → Engineering → Mechanical Engineering

Optical measurement and interference techniques

Physical Sciences → Computer Science → Computer Vision and Pattern Recognition

Surface Roughness and Optical Measurements

Physical Sciences → Engineering → Computational Mechanics

Calibration of z-axis linearity for arbitrary optical topography measuring instruments

Abstract

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Citation History

Topics

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