JOURNAL ARTICLE
Calibration sample for arbitrary metrological characteristics of optical topography measuring instruments
Eifler, M.Hering, J.Freymann, G. vonSeewig, J.
Year: 2025 Journal: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V
Keywords:
Calibration Metrology Sample (material) Measuring instrument Instrumentation (computer programming) Accuracy and precision
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Topics
Optical measurement and interference techniques
Physical Sciences → Computer Science → Computer Vision and Pattern Recognition
Advanced Measurement and Metrology Techniques
Physical Sciences → Engineering → Mechanical Engineering
Image Processing Techniques and Applications
Physical Sciences → Engineering → Media Technology
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