JOURNAL ARTICLE
Nanoimprint lithography process chains for the fabrication of micro- and nanodevices
Schift, HelmutUrwyler-Harischandra, PrabithaKristiansen, Per MagnusGobrecht, Jens
Year: 2017 Journal: Open Access CRIS of the University of Bern
Keywords:
Nanoimprint lithography Fabrication Process (computing) Lithography Computational lithography
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Topics
Mycorrhizal Fungi and Plant Interactions
Life Sciences → Agricultural and Biological Sciences → Plant Science
Genomics and Phylogenetic Studies
Life Sciences → Biochemistry, Genetics and Molecular Biology → Molecular Biology
Plant Pathogens and Fungal Diseases
Life Sciences → Biochemistry, Genetics and Molecular Biology → Cell Biology
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