BOOK-CHAPTER
Nanoimprint Lithography Process
Keywords:
Nanoimprint lithography Materials science Embossing Soft lithography Nanotechnology Lithography Resist Spin coating Coating Optoelectronics Fabrication Composite material Layer (electronics)
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Cited By
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FWCI (Field Weighted Citation Impact)
44
Refs
0.03
Citation Normalized Percentile
Is in top 1%
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Topics
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
Advancements in Photolithography Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
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