SIMULATION PROPERTIES OF THIN FILMS OF INDIUM TIN OXIDE DEPOSITED ON POLYMER SUBSTRATES

Abstract

The interactions between the ion beam and matter are very complex processes that cover a large aspect of different phenomena. In this study, the energy loss, projected range, longitudinal straggling, lateral straggling and ionization of Indium Tin Oxide (ITO), Mylar and ITO/Mylar materials were simulated by SRIM code 2013. The values of energy loss, as well as the range of hydrogen ions in the samples, were obtained between 0.01 and 10Mev. The findings indicate that the growing of ITO on Mylar led to changes in the electronic and nuclear stopping powers and range in the materials. The obtained findings were compared with published data. The details of calculations are given and discussed.