Ferroelectric thin film microwave examination

Kazmirenko, V; Poplavko, Y; Pereverzeva, L; Prokopenko, Y; Kim, B; Jeong, M; Baik, S

JOURNAL ARTICLE

Ferroelectric thin film microwave examination

Kazmirenko, V Poplavko, Y Pereverzeva, L Prokopenko, Y Kim, B Jeong, M Baik, S

Year: 2016 Journal: Open Access System for Information Sharing (Pohang University of Science and Technology) Publisher: Pohang University of Science and Technology

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Abstract

A method for measuring of microwave properties at ferroelectric thin films has been developed, Studied films are deposited onto dielectric substrates, and film-on-substrate "sandwich" is arranged along waveguide. S-11(f) or S-21(f) dependences are studied depending on sensitivity. Redundant measured data processed with specially developed software.

Keywords:

Microwave Ferroelectricity Dielectric Thin film Permittivity

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Ferroelectric thin film microwave examination

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