JOURNAL ARTICLE

Ferroelectric Thin Film Microwave Examination

Abstract

A method for measuring of microwave properties at ferroelectric thin films has been developed. Studied films are deposited onto dielectric substrates, and film-on-substrate "sandwich" is arranged along waveguide. S 11 ( f ) or S 21 ( f ) dependences are studied depending on sensitivity. Redundant measured data processed with specially developed software. Keywords: FerroelectricThin FilmPermittivityLoss TangentRectangular Waveguide

Keywords:
Materials science Microwave Ferroelectricity Thin film Substrate (aquarium) Waveguide Dielectric Optoelectronics Nanotechnology Telecommunications Computer science

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Citation History

Topics

Microwave and Dielectric Measurement Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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