JOURNAL ARTICLE
Surface Passivation of Atmospheric Pressure Dry Etched Multicrystalline Silicon Surfaces
Ridoy, Ahmed IsmailKafle, BishalKhan, N.W.Klitzke, MalteLohmüller, SabrinaClochard, LaurentDuffy, EdwardWolf, AndreasHofmann, Marc
Year: 2025 Journal: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V
Keywords:
Passivation Atmospheric pressure Silicon Surface (topology) Etching (microfabrication)
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Topics
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Nanowire Synthesis and Applications
Physical Sciences → Engineering → Biomedical Engineering
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