JOURNAL ARTICLE

Surface Passivation of Atmospheric Pressure Dry Etched Multicrystalline Silicon Surfaces

Keywords:
Passivation Atmospheric pressure Silicon Surface (topology) Etching (microfabrication)

Metrics

0
Cited By
0.00
FWCI (Field Weighted Citation Impact)
0
Refs
0.38
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry
Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Nanowire Synthesis and Applications
Physical Sciences →  Engineering →  Biomedical Engineering
© 2026 ScienceGate Book Chapters — All rights reserved.