Ultraprecision ELID grinding for Micro Lens Mold(Nanoprecision Elid grinding)

Abstract

In this study, The ELID micro grinding method and inclined rotational grinding by three-axis motion control (XYZ axis) was carried out on a micro aspherical mold. ELID (Electrolytic In-Process Dressing) grinding method is possible to achieve ultraprecision smooth surface of hard and brittle materials. To obtain ultra smooth surface required such as micro lens, final polishing process taken long tune after conventional grinding process was necessary. ELID grinding method using an ultraprecision grinding machine tool has been found to be effective in reducing the time required for finial polishing process in this study. Results of this grinding experiments indicated that ultraprecision surface roughness and form accuracy was achieved successfully. High profile accuracy into effective diameter within ±0.1μm p-v was successfully achieved in this grinding experiment too.