Development of the Micro Tool by the Desk-top ELID Grinding System(Nanoprecision Elid grinding)

Abstract

In this research, processing of micro tools was realized by ELID grinding. However, there was a problem in productivity, that is to say: various shaped processing time is long. Under this background, in order to target high-streamline in establishment of micro tool processing, the desk-top type cylindrical grinding machine called "CYLIN" which is equipped with the ELID system was developed. In this paper, this processing system for micro tools is introduced, and basic experiments processing micro tools of hard metal were conducted. In this experiment, using a#20000 wheel a micro tool of aspect ratio 20 was successfully produced with ELID grinding. And it was suggested that the grinding wheel rotational direction affects the obtained micro tool surface quality. And, in processing of a highaspect-ratio micro tool which was ground by two wheels at the same time, there is no size difference of a root part and a tip part changing.