BOOK-CHAPTER
Local Oxidation Nanolithography
Year: 2003 Nanostructure science and technology Pages: 213-233 Publisher: Springer Nature
Keywords:
Scanning tunneling microscope Lithography Nanolithography Nanotechnology Dip-pen nanolithography Materials science Context (archaeology) Scanning probe microscopy Nanometre Fabrication Analytical Chemistry (journal) Optoelectronics Chemistry
Metrics
2
Cited By
0.00
FWCI (Field Weighted Citation Impact)
67
Refs
0.03
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Force Microscopy Techniques and Applications
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Surface and Thin Film Phenomena
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
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