Local Anodic Oxidation Nanolithography

Abstract

A novel pulse-modulated local anodic oxidation (LAO) nanolithography approach has been developed for fabricating 3D nanostructures. This approach offers enhanced flexibility, efficiency, and cost-effectiveness by leveraging easily programmable pulse parameters through a simple pulse generator. The experimental results demonstrate the remarkable capability of this approach in creating precise 3D nanostructures with sub-10 nm (lateral) and sub-nm (vertical) feature sizes.