SPL and THD improvement of a cantilever-diaphragm piezoelectric MEMS loudspeaker with Double-S actuators

Qincheng Zheng; Ke Cao; Xudong Ma; Ning Deng; Hao Chen; Y. Cheng; Yao Lu; Huikai Xie

doi:10.1038/s41378-025-01031-0

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SPL and THD improvement of a cantilever-diaphragm piezoelectric MEMS loudspeaker with Double-S actuators

Qincheng Zheng Ke Cao Xudong Ma Ning Deng Hao Chen Y. Cheng Yao Lu Huikai Xie

Year: 2025 Journal: Microsystems & Nanoengineering Vol: 11 (1)Pages: 167-167 Publisher: Springer Nature

DOI: 10.1038/s41378-025-01031-0

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Keywords:

Microelectromechanical systems Actuator Loudspeaker Diaphragm (acoustics) Cantilever Total harmonic distortion Materials science Acoustics Piezoelectricity PMUT Electrical engineering Engineering Optoelectronics Voltage Physics Composite material

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

SPL and THD improvement of a cantilever-diaphragm piezoelectric MEMS loudspeaker with Double-S actuators

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