Performance Optimization of Piezoelectric MEMS Speaker with Cantilever Diaphragm Array

Yue Fei; Huimin Zhang; Zhourui Liu; Nan Zhang; Xiaofeng Zhou

doi:10.1109/nems60219.2024.10639849

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JOURNAL ARTICLE

Performance Optimization of Piezoelectric MEMS Speaker with Cantilever Diaphragm Array

Yue Fei Huimin Zhang Zhourui Liu Nan Zhang Xiaofeng Zhou

Year: 2024 Pages: 1-4

DOI: 10.1109/nems60219.2024.10639849

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Keywords:

Cantilever Microelectromechanical systems Diaphragm (acoustics) Acoustics Piezoelectricity Computer science Materials science Optoelectronics Vibration Physics Composite material

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Performance Optimization of Piezoelectric MEMS Speaker with Cantilever Diaphragm Array

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