MEMS Electric Field Sensor with Comb-Actuated Resonant Torsional Shutter

Yo Han Jung; Eunhwan Jo; Jongbaeg Kim

doi:10.1109/transducers61432.2025.11109855

ScienceGate Book Chapters

JOURNAL ARTICLE

MEMS Electric Field Sensor with Comb-Actuated Resonant Torsional Shutter

Yo Han Jung Eunhwan Jo Jongbaeg Kim

Year: 2025 Pages: 251-254

DOI: 10.1109/transducers61432.2025.11109855

Get Full-Text PDF Get Analytical Report

Keywords:

Shutter Microelectromechanical systems Comb drive Electric field Field (mathematics) Electrical engineering Materials science Optoelectronics Acoustics Engineering Physics Optics Fabrication

Metrics

Cited By

3.44

FWCI (Field Weighted Citation Impact)

Refs

0.87

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

MEMS Electric Field Sensor with Comb-Actuated Resonant Torsional Shutter

Metrics

Citation History

Topics

Related Documents

Piezoelectric PZT Film-Driven Resonant Torsional MEMS Electric Field Sensor

Comb-Actuated Resonant Torsional Microscanner With Mechanical Amplification

Comb- Actuated resonant torsional scanner for microdisplays

MEMS electric-field sensor with lead zirconate titanate (PZT)-actuated electrodes

A high-frequency comb-actuated resonant MEMS scanner for microdisplays