JOURNAL ARTICLE
A high-frequency comb-actuated resonant MEMS scanner for microdisplays
Sertan Kutal GökçeSven HolmströmDean BrownWyatt O. DavisHakan Ürey
Year: 2011 Vol: 5721 Pages: 35-36
Abstract
A high-frequency novel torsional MEMS scanner is developed for high resolution microdisplays employing a multi-frame geometry. For the torsional mirror, 26.7° and 36.1° total-optical-scan-angle are achieved at resonance, at atmospheric pressure and vacuum respectively.
Keywords:
Scanner Microelectromechanical systems Optics Comb drive Resonance (particle physics) Materials science Frame rate Physics Optoelectronics
Metrics
9
Cited By
1.42
FWCI (Field Weighted Citation Impact)
12
Refs
0.85
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Semiconductor Lasers and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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