JOURNAL ARTICLE
P‐1.5: Thermal Stability of Short‐Channel Elevated‐Metal Metal‐Oxide Thin‐Film Transistors
Yujie JiangNannan LvDongli ZhangHuaisheng Wang
Year: 2025 Journal: SID Symposium Digest of Technical Papers Vol: 56 (S1)Pages: 715-716 Publisher: Wiley
Abstract
Short‐channel elevated‐metal metal‐oxide (EMMO) TFTs exhibit significantly worse stability after post‐annealing in nitrogen atmosphere compared to long‐channel devices. This short‐channel effect (SCE) was attributed to the oxygen vacancy defects, which is verified by TCAD simulation.
Keywords:
Materials science Metal Thin-film transistor Oxide Thermal stability Channel (broadcasting) Thermal Composite material Optoelectronics Metallurgy Electrical engineering Chemical engineering Engineering Layer (electronics) Thermodynamics Physics
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Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
ZnO doping and properties
Physical Sciences → Materials Science → Materials Chemistry
Transition Metal Oxide Nanomaterials
Physical Sciences → Materials Science → Polymers and Plastics
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