Keywords:
Trench Etching (microfabrication) Materials science Silicon Aspect ratio (aeronautics) Process (computing) Deep reactive-ion etching Optoelectronics Process optimization Reactive-ion etching Computer science Nanotechnology Engineering

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FWCI (Field Weighted Citation Impact)
8
Refs
0.16
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Topics

Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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