BOOK-CHAPTER
Remote Plasmas Chemical Vapour Deposition and Reactive Sputtering in Magnetron Plasmas
Keywords:
Plasma High-power impulse magnetron sputtering Sputtering Sputter deposition Materials science Deposition (geology) Cavity magnetron Nanotechnology Physics Thin film Nuclear physics Geology
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Topics
nanoparticles nucleation surface interactions
Physical Sciences → Earth and Planetary Sciences → Atmospheric Science
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Laser-induced spectroscopy and plasma
Physical Sciences → Engineering → Mechanics of Materials
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