Nanoimprint lithography for scalable fabrication of nanoplasmonic devices

Brett A. Kamino

doi:10.1117/12.3059301

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Nanoimprint lithography for scalable fabrication of nanoplasmonic devices

Brett A. Kamino

Year: 2025 Pages: 31-31

DOI: 10.1117/12.3059301

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Keywords:

Nanoimprint lithography Fabrication Scalability Lithography Materials science Nanotechnology Next-generation lithography Nanolithography Computer science Electron-beam lithography Optoelectronics Resist

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Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Microfluidic and Bio-sensing Technologies

Physical Sciences → Engineering → Biomedical Engineering

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Nanoimprint lithography for scalable fabrication of nanoplasmonic devices

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