JOURNAL ARTICLE

Fabrication of Ultra-Low-Loss, Dispersion-Engineered Silicon Nitride Photonic Integrated Circuits via Silicon Hardmask Etching

Keywords:
Materials science Fabrication Etching (microfabrication) Silicon nitride Silicon Photonics Optoelectronics Photonic integrated circuit Silicon photonics Nanotechnology Dispersion (optics) Nitride Hybrid silicon laser Optics Physics

Metrics

4
Cited By
13.77
FWCI (Field Weighted Citation Impact)
50
Refs
0.96
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced Fiber Laser Technologies
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Photonic and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Photonic Communication Systems
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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