JOURNAL ARTICLE
Fabrication of Ultra-Low-Loss, Dispersion-Engineered Silicon Nitride Photonic Integrated Circuits via Silicon Hardmask Etching
Shuai LiuYuheng ZhangAbdulkarim HaririAbdur-Raheem Al-HallakZheshen Zhang
Year: 2025 Journal: ACS Photonics Vol: 12 (2)Pages: 1039-1046 Publisher: American Chemical Society
Keywords:
Materials science Fabrication Etching (microfabrication) Silicon nitride Silicon Photonics Optoelectronics Photonic integrated circuit Silicon photonics Nanotechnology Dispersion (optics) Nitride Hybrid silicon laser Optics Physics
Metrics
4
Cited By
13.77
FWCI (Field Weighted Citation Impact)
50
Refs
0.96
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced Fiber Laser Technologies
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Photonic Communication Systems
Physical Sciences → Engineering → Electrical and Electronic Engineering
Related Documents
JOURNAL ARTICLE
Fabricationof Ultra-Low-Loss, Dispersion-EngineeredSilicon Nitride Photonic Integrated Circuits via Silicon HardmaskEtching
Shuai Liu (145969)Yuheng Zhang (1543663)Abdulkarim Hariri (20135262)Abdur-Raheem Al-Hallak (20135265)Zheshen Zhang (11470132)
Journal: OPAL (Open@LaTrobe) (La Trobe University) Year: 2025
JOURNAL ARTICLE
High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits
Junqiu LiuGuanhao HuangRui Ning WangJijun HeArslan S. RajaTianyi LiuNils J. EngelsenTobias J. Kippenberg
Journal: Nature Communications Year: 2021 Vol: 12 (1)Pages: 2236-2236
JOURNAL ARTICLE
High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits
Junqiu LiuGuanhao HuangRui Ning WangJijun HeArslan S. RajaTianyi LiuNils J. EngelsenTobias J. Kippenberg
Journal: Conference on Lasers and Electro-Optics Year: 2021 Pages: STu2Q.2-STu2Q.2
JOURNAL ARTICLE
Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuits
Zhichao YeH JiaZhangjun HuangChen ShenJinbao LongBaoqi ShiYi-Han LuoLan GaoWei SunHairun GuoJijun HeJunqiu Liu
Journal: Photonics Research Year: 2023 Vol: 11 (4)Pages: 558-558