Laser-Induced Graphene-Based Pressure Sensor With Corrugated Polyimide Diaphragm

Ryo Oda; Rihachiro Nakashima; Hidetoshi Takahashi

doi:10.1109/jsen.2025.3531923

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Laser-Induced Graphene-Based Pressure Sensor With Corrugated Polyimide Diaphragm

Ryo Oda Rihachiro Nakashima Hidetoshi Takahashi

Year: 2025 Journal: IEEE Sensors Journal Vol: 25 (5)Pages: 8115-8123 Publisher: IEEE Sensors Council

DOI: 10.1109/jsen.2025.3531923

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Keywords:

Polyimide Graphene Materials science Diaphragm (acoustics) Pressure sensor Optoelectronics Composite material Laser Nanotechnology Optics Electrical engineering Mechanical engineering Engineering Layer (electronics)

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Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Laser-Induced Graphene-Based Pressure Sensor With Corrugated Polyimide Diaphragm

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