Corrugated Graphene Network Based Pressure Sensor

Abstract

This work reports the corrugated graphene based capacitive pressure sensor. Corrugated graphene forms an array of parallel-aligned ridges, which, due to the induced strain at its sharp edges, produces high charge density along the sharp ridges of the graphene. This high charge concentration at the sharp edges of top and bottom corrugated graphene electrode increases the responsiveness and sensitivity of the presented device to the applied pressure. Thus, the presented sensor utilizes the remarkable electronic properties of graphene by modifying its surface morphology. The sensor works in the dynamic range of 125-980 Pa and offers a sensitivity of 1.2 × 10 ^-4 Pa ^-1 . As compared to planar graphene-based sensor, a three-fold increase in the performance is observed with corrugated graphene-based sensor.